SANTOVAC 5 VACUUM DIFFUSION PUMP FLUID
Santovac 5 is a five-ring polyphenyl ether fluid, operates efficiently, economically and safely in diffusion pumps to produce ultra-high vacuums in the 10^-10 torr range in properly designed systems. Santovac 5's wide liquid range, low vapor pressure, and the unique balance of properties listed below make it an ideal candidate for your vacuum needs.

LOW VAPOR PRESSURE: Extremely low vapor results in low ultimate pressures. Vapor pressure of Santovac 5 at 25°C, (obtained by extrapolation at higher temperature data) is 4x10^-10 torr. This means lower ultimate vacuum.

LOW BACKSTREAMING: Backstreaming depends on the vapor pressure of the fluids, the system design, operating conditions and the temperature of the collecting surface. Santovac 5 has inherently low backstreaming characteristics -- as low or lower than any other commercially available fluid.

The result is less contamination in chambers and longer-term operation for those processes that are sensitive to organic matter. This makes polyphenyl ether type fluids like Santovac 5 well suited for electronic component applications.