PRV-CF133 Series - New Design Features

Pneumatic connection:

1/8” NPT-F

Mounting position:

Any

Operating pressure range:

1000 Torr ~ 1x10^-8 Torr

Leak rate:

1 x 10^-9 Torr l/s, He

Pneumatic operating pressure:
(Minimum ~ Maximum)

4 bar ~ 5.5 bar
60 psi ~ 80 psi

Temperatures

Valve body:

250°C Open, 200°C Closed

Actuator

100°C

Bake-out:

100°C

Materials

Feedthrough:

Welded Bellows in AM350

Valve body:

SUS304/304L

Mechanism:

SUS304/304L

Actuator:

Aluminum