XLAV-63-M9-5L
ISO63 (LF63) Pneumatic Industrial Right Angle Vacuum Valve (Aluminum) With 24 VDC Solenoid
Normally Closed, Pressurize to Open
• J: 1.14"
• K: 1.14"
• L: 0.47"
• M: 0.16"
• N: 0.08"
• High Vacuum Industrial Valve
• Spring Seal
• Magnetic Piston
• Service Life: 2 Million Cycles
• Aluminum Body
XLAV Series Includes:
• 24 VDC Solenoid
• Light and Surge Suppressor
Operating Temperature:
• 5 to 50°C
Operating Pressure:
• 760 to 7.5x10-9 Torr
*Leakage:
• Internal: 10-9 Torr l/s
• External: 10-10 Torr l/s
*At ordinary temperatures, excluding gas permeation
ISO63 (ISO-K) Series
• High Vacuum Flange OD: Ø3.74"
• Tube OD: 2.63"
• ISO-K Claw Clamp Style
ISO63 High Vacuum Flange Equivalents:
ISO-63, LF63, NW63, NW-63, Large Flange,
ISO-LF, ISO-K, ISO-MF
XLAV-ISO63-M9-5L XLAV-63L-M9//-5LZ XLAV-63G-M9//-5L SMC XLAV-63L-M9//-5L