XLA-63-M9
ISO63 (LF63) Pneumatic Industrial Right Angle Vacuum Valve (Aluminum) Without Solenoid
Normally Closed, Pressurize to Open
• High Vacuum Industrial Valve
• Spring Seal
• Magnetic Piston
• Service Life: 2 Million Cycles
• Aluminum Body
Operating Temperature:
• 5 to 60°C
Operating Pressure:
• 760 to 7.5x10-9 Torr
*Leakage:
• Internal: 10-9 Torr l/s
• External: 10-10 Torr l/s
*At ordinary temperatures, excluding gas permeation
ISO63 (ISO-K) Series
• High Vacuum Flange OD: Ø3.74"
• Tube OD: 2.63"
• ISO-K Claw Clamp Style
ISO63 High Vacuum Flange Equivalents:
ISO-63, LF63, NW63, NW-63, Large Flange,
ISO-LF, ISO-K, ISO-MF
XLA-ISO63-M9 XLA-63A-2M9// SMC XKA-63-M9//